HIGHER PURITY
The Bluestone IPA drying system benefits from a proven method of IPA handling. It uses only fresh IPA for each cleaning batch. The process reduces contamination, improves purity and ensures repeatable, consistent cleanliness. |
|
SYSTEM QUALITY
The system has a specially designed quartz tank, quartz saucer and quartz condensing colis which are maintained in a nitrogen-enriched atmosphere filtered to 0.05 micron. |
|
FINISHED PRODUCT QUALITY
This system has a proven track record in the semi-conductor-wafer manufacturing industry. It has consistently shown that It can significantly decrease particle concentration compared to other processes. |
Through advanced IPA (isopropyl alcohol) handling technology the Bluestone vapor Drier provides highly effective. streak-free drying of wafers. glass and quartz plates. discs. pellicles, LCDs, metal discs, Teflon products and a wide range of other products.
Process Outline:
The system uses a water solubilization mechanism for complete removal of water measured down to molecular level.
Before drying, the wafers are either hydrophobic or hydrophilic. The drier uses IPA to absorb surface DI water. With an extremely low surface tension rating, the iPA permeates surface cracks, line geometries and deep trenches. As a result the Bluestone vapor Drier effectively removes moisture which other drying systems may not reach.
The IPA then rises to the surface and uniformly covers the wafer or product surface. No impurities are introduced by this process, thereby protecting the Integrity of the wafer surface
In the drying process the water-enriched IPA sheds off the surface of the water, due to the specific gravity differential of IPA and DI water. Final rinsing is then performed through continued vapor condensation.
The Bluestone vapor Drier is designed for simple and versatile operation. Cassettes are lowered Into the vapor zone where they undergo a 3-6 minute process cycle and a 1-4 minute final dry cycle. The total drying times will vary depending on the carrier and options selected. A comprehensive control panel makes operation and process monitoring clear and easy. Status and alarm indicators communicate important information to the operator. Process configuration capability, manual function and trouble-shooting are also available through a touch-screen LCD panel.
